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specular reflectance accessories



SLM-736 Specular reflectance accessory for
SLM-737 Specular reflectance accessory for


Wavelength range :

250 to 1000 nm V-630


200 to 870 nm V-650/660


200 to 2500 nm V-670

Sample size :

Sample side


Minimum 10x10 mm


Maximum 100x120 mm


Reference side


Minimum 10x10 mm


Maximum 20x20 mm

Beam port diameter

7 mm (4 mm, 2 mm as option)

Angle of Incidence :

Approx. 5deg

Reflection reference:

Aluminum-deposited plane mirror (Standard mirror)




SLM-738  Specular reflectance accessory for V-650/660/670 (accomodating 6-inch Silicon Wafers)

Specifications as SLM-736/737

Optional accessories

  • Polarizer (GPH-506)
  • Application program (Film thickness calculation program, etc.)
  • Sample stage with 2-mm-dia. port
  • Sample stage with 4-mm-dia. port